Model DX-7AG
Function: it has two worktables to be operated in the meantime, worktable
with a carrier board to orient the wafer end face and reference side. It is
mainly used to test mono-crystal materials in a high precision.
Characteristics: it is a high-precision orientation unit in double-crystal
diffraction for large-size wafers of lower intensity and stronger in diffraction
capacity.
Technical Data:
|
item
|
data
|
|
input power supply
|
mono-phase AC 220 V，50 Hz，0.3 KW.
|
|
tuba voltage
max.
|
30 kV
|
|
tube current
|
0-5 mA continuously
adjustable
|
|
detector
|
scintillator detector，work voltage max. DC 1 000 V
|
|
x-ray tube
|
copper target, fan
cooling, grounded anode
|
|
measured
angles
|
2θ=－10～120°，θ=－5～60°。
|
|
comprehensive precision
|
±15″（measured with standard quartz plane 10ī1）
|
|
reading min.
|
1″
|
|
overall dimension
|
1132（L）×642（W）×1200（H）mm
|
|
weight
|
300 kg
|