DX-7A Orientation Unit for Mono-Crystal Wafers( Models 7AC\7AS\7AZ)
Functions: it is used to measure mono-crystal wafer surface and reference-plane angles after cutting, also measure the wafers of the other materials. There is a vacuum pump. It could measure the wafers of 3 – 8” in diameter and crystal faces 100, 110, 111 and 210 etc. there are two work tables to finish identical tasks at the same time; also it separately measures the wafer surface and reference plane according to the customer requirement.
Technical Data:
|
item
|
data
|
|
input power
supply
|
mono-phase AC 220 V，50 Hz，0.3 KW.
|
|
tube voltage
max.
|
30 kV
|
|
tube current
|
0-5 mA continuously
adjustable
|
|
receiver
|
Geiger counter，work voltage max. DC 1 050 V
|
|
x-ray tube
|
copper target, fan
cooling, grounded anode
|
|
measured
angles
|
2θ=－10～120°，θ=－5～60°。
|
|
comprehensive precision
|
±30″（measured with standard quartz plane 10ī1）
|
|
reading min.
|
1″
|
|
overall dimension
|
1290（L）x772（W）x1300（H）mm
|
|
weight
|
300 kg
|